White light interferometry (WLI) is an effective and widely‐used technique for structured surface measurement. However, it requires multiframe interferograms with vertical scanning to realise large‐scale measurement, which is time consuming and computationally intensive. This paper proposes a rapid surface measurement method to realise surface recovery with a single interferogram by white light interferometry. First, the feasibility to solve the wrapped phase of a single white‐light interferogram by Hilbert transform is certified. Then, unwrapped phases against zero optical path difference position (OPD) are achieved by a zero optical path difference detection algorithm applied to unwrapping process, which provides efficient surface recovery. To ensure the accuracy of phase solution in the proposed method, the necessary number and width of the interference fringes in the interferogram are analysed and determined based on Hilbert transform and sampling analysis. Finally, measurement results of a standard step sample and a standard reticle template are presented, which prove the accuracy and efficiency of the proposed method.

中文翻译：

---

一种白光干涉测量中结构化表面的快速测量方法

白光干涉测量法 (WLI) 是一种有效且广泛使用的结构化表面测量技术。然而，它需要具有垂直扫描的多帧干涉图来实现大规模测量，这是耗时且计算量大的。本文提出了一种快速表面测量方法，通过白光干涉测量实现单幅干涉图的表面恢复。首先，证明了通过希尔伯特变换解决单个白光干涉图缠绕相位的可行性。然后，通过应用于展开过程的零光程差检测算法实现针对零光程差位置 (OPD) 的展开相位，从而提供有效的表面恢复。为保证所提方法中相位求解的准确性，基于希尔伯特变换和采样分析，分析确定干涉图中干涉条纹的必要数量和宽度。最后给出了标准台阶样品和标准光罩模板的测量结果，证明了所提出方法的准确性和效率。