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Study and design of a lens-type retarding field energy analyzer without a grid electrode
Ultramicroscopy ( IF 2.2 ) Pub Date : 2020-02-01 , DOI: 10.1016/j.ultramic.2019.112880
Junhyeok Hwang 1 , Kwang-Il Kim 2 , Takashi Ogawa 3 , Boklae Cho 3 , Dong-Hyun Kim 4 , In-Yong Park 2
Affiliation  

A retarding field energy analyzer (RFEA) for measuring the energy distribution of charged particles offers the advantages of a simple structure and suitability for simultaneous observations of beam patterns in two dimensions. In this study, lens-based RFEAs without a grid electrode were theoretically investigated with regard to the geometry and lens condition to achieve high performance. The simulation results show that the proposed RFEA can achieve a resolution of 2.6 meV at an energy level of 500 eV. In addition, performance, which is the ratio of the resolution to the beam energy, reached 5.2×10-6. These results indicate that the RFEA designed in this study is capable of high-performance outcomes. The findings here demonstrate that the most important factors when attempting to realize a high-resolution RFEA design are to reduce the sagging effect of the electron beam through the focusing lens and ensure that V″(z) in the retarding electrode is close to zero. The design of the lens-based RFEAs is described in detail.

中文翻译:

一种无栅电极的透镜式延迟场能分析仪的研究与设计

用于测量带电粒子能量分布的减速场能量分析仪 (RFEA) 具有结构简单和适用于同时观察二维光束模式的优点。在这项研究中,从理论上研究了没有网格电极的基于透镜的 RFEA 的几何形状和透镜条件,以实现高性能。仿真结果表明,所提出的 RFEA 可以在 500 eV 的能级下实现 2.6 meV 的分辨率。此外,性能,即分辨率与光束能量的比率,达到了 5.2×10-6。这些结果表明,本研究中设计的 RFEA 能够产生高性能结果。这里的发现表明,尝试实现高分辨率 RFEA 设计时最重要的因素是减少电子束通过聚焦透镜的下垂效应,并确保延迟电极中的 V"(z) 接近于零。详细描述了基于透镜的 RFEA 的设计。
更新日期:2020-02-01
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