A subnanometric resolution method for studying the local atomic structure of interface and surface of low contrast multilayered nanoheterostructure thin films is applied to the Fe/Cr multilayer sample with GMR (Giant Magnetoresistance) effect. We consider combination of the X-ray reflectivity (XRR) and the Extended X-ray absorption Fine Structure (EXAFS) spectroscopy with angular resolution. The XRR experiment has been carried out according to standard procedure using a specialized X-ray diffractometer «Empyrean» at the Institute of Metal Physics (Ekaterinburg). We have applied a measurement method proposed earlier by V. P. Romanov et al. This approach allowed us to separate the diffuse and pure specular contributions. To determine the concentration depth-profile of element from XRR data, we have implemented the Levenberg-Marquardt (L-M) algorithm for nonlinear inverse problem. Thus, the phase problem for X-ray specular reflectivity has been solving. The EXAFS measurements has been performed using synchrotron facilities (National Research Centre “Kurchatov Institute”). {The Fe and Cr K absorption spectra} were recorded in fluorescence mode with angular resolution. The experimental results for depth-resolved local atomic structure of Fe/Cr multilayer with GMR effect has been obtained. A depth resolution of 2$-$3 Å was reached. Atomic structure of Fe and Cr atoms located at seven depth points including interface for the Al₂O₃/Cr(100 Å)/[Fe(8 Å)/Cr(10,5 Å)]₂/Cr(20 Å) multilayered sample was obtained. It was shown what chromium oxides were present on the surface of the sample.

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将亚微米分辨率法用于研究低对比度多层纳米异质结构薄膜界面和表面的局部原子结构，并将其应用于具有GMR（巨磁阻）效应的Fe / Cr多层样品。我们考虑将X射线反射率（XRR）和扩展X射线吸收精细结构（EXAFS）光谱学与角分辨率结合起来使用。XRR实验是根据标准程序，使用金属物理研究所（叶卡捷琳堡）的专门X射线衍射仪“ Empyrean”进行的。我们已经应用了VP Romanov等人先前提出的一种测量方法。这种方法使我们能够将漫反射和纯镜面反射贡献分开。要从XRR数据确定元素的浓度深度分布，我们已经针对非线性逆问题实施了Levenberg-Marquardt（LM）算法。因此，解决了X射线镜面反射率的相位问题。EXAFS测量是使用同步加速器设施（国家研究中心“库尔恰托夫研究所”）进行的。{Fe和Cr K吸收光谱}以荧光模式以角分辨率记录。获得了具有GMR效应的Fe / Cr多层膜深度解析局部原子结构的实验结果。深度分辨率为2 获得了具有GMR效应的Fe / Cr多层膜深度解析局部原子结构的实验结果。深度分辨率为2 获得了具有GMR效应的Fe / Cr多层膜深度解析局部原子结构的实验结果。深度分辨率为2$--$达到3Å。位于七个深度点的Fe和Cr原子的原子结构，包括多层Al ₂ O ₃ / Cr（100Å）/ [Fe（8Å）/ Cr（10,5Å）] ₂ / Cr（20Å）的界面获得样品。证明了样品表面上存在什么氧化铬。

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