Abstract The performance of cutting tools was examined, involving synthesis of a 10 nm thin film of Aluminum oxide using atomic layer deposition. Characterization of coated and uncoated cutting tools was done by several methods. scanning electron microscopy was used and the images were compared with each other. Chemical characterization was performed by X-ray diffraction and X-ray photoelectron spectroscopy. Coated and uncoated cutting tools were tested with steel material in turning tests. After turning, it was observed that the adhesion effect was reduced to a large extent in turning with coated tool. It was observed that the coating showed stability at high temperatures during cutting and the cutting performance was increased. The main advantage of the coating was that the tools produced were more environmentally friendly, with a longer useful life and they were easier to recycle.

中文翻译：

---

原子层沉积涂层刀具的 X 射线光电子能谱表征和切削性能检测

摘要 研究了切削工具的性能，包括使用原子层沉积合成 10 nm 氧化铝薄膜。涂层和未涂层​​刀具的表征是通过几种方法完成的。使用扫描电子显微镜，并将图像相互比较。通过 X 射线衍射和 X 射线光电子能谱进行化学表征。在车削试验中用钢材对涂层和无涂层刀具进行了测试。车削后，观察到在使用涂层刀具车削时，粘附效果在很大程度上降低。观察到涂层在切削过程中在高温下表现出稳定性并且切削性能得到提高。涂层的主要优点是生产的工具更环保，