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Numerical enhancements of the microwave resonant cavity method for plasma diagnostics
Plasma Sources Science and Technology ( IF 4.128 ) Pub Date : 2019-10-16 , DOI: 10.1088/1361-6595/ab4300
J Faltýnek, V Kudrle, J Tesař, M Volfová and A Tálský

Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries.
更新日期:2019-10-17

 

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