Plasma Sources Science and Technology ( IF 3.193 ) Pub Date : 2019-09-23 , DOI: 10.1088/1361-6595/ab419d
Bocong Zheng, Keliang Wang, Timothy Grotjohn, Thomas Schuelke and Qi Hua Fan

In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the ##IMG## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn1.gif] {${\boldsymbol{E}}\times {\boldsymbol{B}}$} direction. As the magnetic field increases, the Ohmic heating in the ##IMG## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn2.gif] {${\boldsymbol{E}}\times {\boldsymbol{B}}$} direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.

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