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Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
Plasma Sources Science and Technology ( IF 3.8 ) Pub Date : 2019-09-23 , DOI: 10.1088/1361-6595/ab419d Bocong Zheng 1 , Keliang Wang 1 , Timothy Grotjohn 1, 2 , Thomas Schuelke 1, 2 , Qi Hua Fan 1, 2, 3
Plasma Sources Science and Technology ( IF 3.8 ) Pub Date : 2019-09-23 , DOI: 10.1088/1361-6595/ab419d Bocong Zheng 1 , Keliang Wang 1 , Timothy Grotjohn 1, 2 , Thomas Schuelke 1, 2 , Qi Hua Fan 1, 2, 3
Affiliation
In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the ##IMG## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn1.gif] {${\boldsymbol{E}}\times {\boldsymbol{B}}$} direction. As the magnetic field increases, the Ohmic heating in the ##IMG## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn2.gif] {${\boldsymbol{E}}\times {\boldsymbol{B}}$} direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.
中文翻译:
磁化电容耦合放电中的霍尔电流可增强欧姆加热
在低压电容耦合放电中,通过施加小的横向磁场,已知从压力加热为主的状态到欧姆加热为主的状态的加热模式转变。在这里,我们通过粒子模拟和对Boltzmann方程的矩分析证明,欧姆热的增强是由## IMG ## [http://ej.iop.org/images/ 0963-0252 / 28/9 / 09LT03 / psstab419dieqn1.gif] {$ {\ boldsymbol {E}} \ times {\ boldsymbol {B}} $}方向。随着磁场的增加,## IMG ## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn2.gif] {$ {\ boldsymbol {E }} \时代{\ boldsymbol {B}} $}方向主导着总的电子功率吸收。
更新日期:2019-09-25
中文翻译:
磁化电容耦合放电中的霍尔电流可增强欧姆加热
在低压电容耦合放电中,通过施加小的横向磁场,已知从压力加热为主的状态到欧姆加热为主的状态的加热模式转变。在这里,我们通过粒子模拟和对Boltzmann方程的矩分析证明,欧姆热的增强是由## IMG ## [http://ej.iop.org/images/ 0963-0252 / 28/9 / 09LT03 / psstab419dieqn1.gif] {$ {\ boldsymbol {E}} \ times {\ boldsymbol {B}} $}方向。随着磁场的增加,## IMG ## [http://ej.iop.org/images/0963-0252/28/9/09LT03/psstab419dieqn2.gif] {$ {\ boldsymbol {E }} \时代{\ boldsymbol {B}} $}方向主导着总的电子功率吸收。