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Effects of Oxide Ions on the Electrodeposition Process of Silicon in Molten Fluorides
Journal of The Electrochemical Society ( IF 3.9 ) Pub Date : 2019-08-13 , DOI: 10.1149/2.0441913jes
Yuta Suzuki , Yosuke Inoue , Masayuki Yokota , Takuya Goto

We studied the effects of O2− ions on the coordination structure of Si ions and the electrodeposition process of Si films in molten fluorides using SiO2 powder (as a source of Si) and Li2O (as a source of O2−). High-temperature Raman spectroscopic data revealed that the dissolution of SiO2 in molten KF, LiF-KF, and LiF-NaF-KF without Li2O was proceeded by the formation of silicate ions, with the [Si2O5]2− ion acting as the dominant species. On the other hand, when 3.0 mol% Li2O was added to molten LiF-KF and LiF-NaF-KF, the intensity of Raman band due to [SiO3F]3− ion was increased compared to that without Li2O system, which indicated that the O2− ions could cause breakage of Si-O-Si bonds of SiO2 or [Si2O5]2− ions. Furthermore, the reduction currents, attributed to the reduction of Si ions, increased significantly by the addition of Li2O; moreover, the thickness and current efficiency of the electrodeposited polycrystalline Si layer prepared by potentiostatic electrolysis was improved. These results indicated that the O2− ions can change the coordination structure of Si ions in molten fluorides and that the design of the molten salts bath is a key technology for fabricating high-quality Si layers with high current efficiency.

中文翻译:

氧化物对熔融氟化物中硅电沉积过程的影响

我们使用SiO 2粉末(作为Si的来源)和Li 2 O(作为O 2-的来源)研究了O 2-离子对Si离子的配位结构和熔融氟化物中Si膜的电沉积过程的影响。。高温拉曼光谱数据显示,在没有Li 2 O的情况下,熔融KF,LiF-KF和LiF-NaF-KF中SiO 2的溶解是通过硅酸盐离子的形成而进行的,其中[Si 2 O 5 ] 2−离子起主导作用。另一方面,当将3.0mol%的Li 2 O添加到熔融的LiF-KF和LiF-NaF-KF中时,由于[SiO 3与无Li 2 O体系相比,F] 3-离子增加,这表明O 2-离子可能导致SiO 2或[Si 2 O 5 ] 2-离子的Si-O-Si键断裂。此外,归因于Si离子的还原的还原电流通过添加Li 2 O而显着增加;因此,还原电流显着增加。此外,通过恒电位电解制备的电沉积多晶Si层的厚度和电流效率得到改善。这些结果表明,O 2− 离子可以改变熔融氟化物中硅离子的配位结构,而熔融盐浴的设计是制造高电流效率的高质量硅层的关键技术。
更新日期:2019-08-14
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