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Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations
Current Opinion in Solid State & Materials Science ( IF 11.0 ) Pub Date : 2019-07-09 , DOI: 10.1016/j.cossms.2019.06.001
William J. Weber , Yanwen Zhang

The computer code, Stopping and Range of Ions in Matter (SRIM), is widely used to describe energetic processes of ion-solid interactions; its predictive power relies on the accuracy of energy loss/transfer and collision processes being considered. While the SRIM code is commonly applied in radiation effects research to predict damage production and in the semiconductor industry to estimate ion range and dopant concentration profiles, two challenges exist that affect its use: (1) inconsistency in estimations of atomic displacements between full-cascade and quick (modified Kinchin–Pease) options and (2) overestimation of electronic stopping power for slow heavy ions in light targets (e.g., Be and Si) or in compound targets containing light elements (e.g., C, N and O in carbides, nitrides and oxides). Based on a literature review and our experimental investigations, we discuss the underlying reasons for the discrepancies, clarify the physical limitations of the SRIM predictions, and, more importantly, provide recommendations to address the two challenges.



中文翻译:

使用物质代码中的离子的终止和范围来预测单原子和多元素目标中的损伤产生:挑战和建议

计算机代码“物质中的离子的停止和作用范围”(SRIM)被广泛用于描述离子-固体相互作用的高能过程。它的预测能力取决于能量损失/传递和碰撞过程的准确性。虽然SRIM代码通常用于辐射效应研究中以预测损伤产生,并在半导体行业中通常用于估计离子范围和掺杂剂浓度分布,但存在两个挑战影响其使用:(1)估算全级联之间的原子位移不一致。以及快速(改进的Kinchin-Pease)选项,以及(2)高估了轻目标(例如Be和Si)或含有轻元素(例如碳化物中的C,N和O)的复合目标中的慢重离子的电子停止能力,氮化物和氧化物)。

更新日期:2019-07-09
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