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Highly stretchable graphene nanoribbon springs by programmable nanowire lithography
npj 2D Materials and Applications ( IF 9.7 ) Pub Date : 2019-05-24 , DOI: 10.1038/s41699-019-0105-7
Chuan Liu , Bing Yao , Taige Dong , Haiguang Ma , Shaobo Zhang , Junzhuan Wang , Jun Xu , Yi Shi , Kunji Chen , Libo Gao , Linwei Yu

Graphene nanoribbons are ideal candidates to serve as highly conductive, flexible, and transparent interconnections, or the active channels for nanoelectronics. However, patterning narrow graphene nanoribbons to <100 nm wide usually requires inefficient micro/nano fabrication processes, which are hard to implement for large area or flexible electronic and sensory applications. Here, we develop a precise and scalable nanowire lithography technology that enables reliable batch manufacturing of ultra-long graphene nanoribbon arrays with programmable geometry and narrow width down to ~50 nm. The orderly graphene nanoribbons are patterned out of few-layer graphene sheets by using ultra-long silicon nanowires as masks, which are produced via in-plane solid–liquid–solid guided growth and then transferred reliably onto various stiff or flexible substrates. More importantly, the geometry of the graphene nanoribbons can be predesigned and engineered into elastic two-dimensional springs to achieve outstanding stretchability of >30%, while carrying stable and repeatable electronic transport. We suggest that this convenient scalable nanowire lithography technology has great potential to establish a general and efficient strategy to batch-pattern or integrate various two-dimensional materials as active channels and interconnections for emerging flexible electronic applications.



中文翻译:

通过可编程纳米线光刻技术实现的高度可拉伸石墨烯纳米带弹簧

石墨烯纳米带是用作高导电性,柔性和透明互连或纳米电子有源通道的理想候选者。然而,将窄的石墨烯纳米带图案化到<100 nm的宽度通常需要效率低下的微/纳米制造工艺,这对于大面积或柔性电子和传感应用而言很难实现。在这里,我们开发了一种精确且可扩展的纳米线光刻技术,该技术能够可靠地批量生产具有可编程几何形状且宽度窄至约50 nm的超长石墨烯纳米带阵列。通过使用超长硅纳米线作为掩模,从几层石墨烯片中将有序的石墨烯纳米带图案化,它们是通过平面内固-液-固引导生长而产生的,然后可靠地转移到各种刚性或柔性基材上。更重要的是,可以预先设计石墨烯纳米带的几何形状并将其设计成弹性二维弹簧,以实现> 30%的出色拉伸性,同时进行稳定且可重复的电子传输。我们建议,这种方便的可扩展纳米线光刻技术具有巨大的潜力,可以建立通用且有效的策略来批量图案化或集成各种二维材料,作为新兴柔性电子应用的有源通道和互连。同时进行稳定且可重复的电子运输。我们建议,这种方便的可扩展纳米线光刻技术具有巨大的潜力,可以建立通用且有效的策略来批量图案化或集成各种二维材料,作为新兴柔性电子应用的有源通道和互连。同时进行稳定且可重复的电子运输。我们建议,这种方便的可扩展纳米线光刻技术具有巨大的潜力,可以建立通用且有效的策略来批量图案化或集成各种二维材料,作为新兴柔性电子应用的有源通道和互连。

更新日期:2019-05-24
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