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Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems
International Materials Reviews ( IF 16.1 ) Pub Date : 2018-12-18 , DOI: 10.1080/09506608.2018.1543832
Jongpil Ye 1 , Dmitry Zuev 2 , Sergey Makarov 2
Affiliation  

ABSTRACT Recent progress in submicron- and nano-fabrication technologies has led to the emergence of novel photonic structures such as optical nanoantennas and metasurfaces. Real-life applications of these advanced photonic structures still require substantial improvement of the fabrication processes, in terms of their throughput and cost-effectiveness. Because of its simplicity and effectiveness, dewetting of a thin film has attained increasing attention as a feasible process for improving the scalability and productivity. Here, we provide an overview of the mechanisms and phenomenologies of dewetting to foster an improved fundamental understanding necessary for the optimisation of the dewetting process condition and template design. We then review the strategies demonstrating the use of templated-dewetting for producing well-aligned arrays of submicron- and nanostructures with great control over their size, shape and arrangement. Recent applications of dewetted structures in advanced nanophotonics are reviewed with an emphasis on the exploitation of dewetting mechanisms. Special attention is given to the fabrication of resonant optical nanoantennas and nanophotonic applications in which high repeatability and throughput are important parameters: sensing, colourisation, photovoltaics and nonlinear light frequency conversion. We expect this review to provide a basis for the use of thin-film dewetting to realise the industrial-level fabrication of various practical advanced photonic systems.

中文翻译:

去湿机制及其在先进纳米光子系统大规模制造中的应用

摘要亚微米和纳米制造技术的最新进展导致了新型光子结构的出现,例如光学纳米天线和超表面。这些先进的光子结构在现实生活中的应用仍然需要在其吞吐量和成本效益方面对制造工艺进行实质性改进。由于其简单性和有效性,薄膜的去湿作为一种提高可扩展性和生产率的可行方法而受到越来越多的关注。在这里,我们概述了去湿的机制和现象,以促进对去湿工艺条件和模板设计的优化所需的改进的基本理解。然后,我们回顾了展示使用模板化去湿法生产排列良好的亚微米和纳米结构阵列的策略,并能很好地控制它们的尺寸、形状和排列。回顾了去湿结构在先进纳米光子学中的最新应用,重点是对去湿机制的开发。特别关注谐振光学纳米天线的制造和纳米光子应用,其中高重复性和吞吐量是重要参数:传感、着色、光伏和非线性光频率转换。我们希望这篇综述为使用薄膜去湿技术实现各种实用的先进光子系统的工业级制造提供基础。回顾了去湿结构在先进纳米光子学中的最新应用,重点是对去湿机制的开发。特别关注谐振光学纳米天线的制造和纳米光子应用,其中高重复性和吞吐量是重要参数:传感、着色、光伏和非线性光频率转换。我们希望这篇综述为使用薄膜去湿技术实现各种实用的先进光子系统的工业级制造提供基础。回顾了去湿结构在先进纳米光子学中的最新应用,重点是对去湿机制的开发。特别关注谐振光学纳米天线的制造和纳米光子应用,其中高重复性和吞吐量是重要参数:传感、着色、光伏和非线性光频率转换。我们希望这篇综述为使用薄膜去湿技术实现各种实用的先进光子系统的工业级制造提供基础。特别关注谐振光学纳米天线的制造和纳米光子应用,其中高重复性和吞吐量是重要参数:传感、着色、光伏和非线性光频率转换。我们希望这篇综述为使用薄膜去湿技术实现各种实用的先进光子系统的工业级制造提供基础。特别关注谐振光学纳米天线的制造和纳米光子应用,其中高重复性和吞吐量是重要参数:传感、着色、光伏和非线性光频率转换。我们希望这篇综述为使用薄膜去湿技术实现各种实用的先进光子系统的工业级制造提供基础。
更新日期:2018-12-18
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