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Highly compliant planar Hall effect sensor with sub 200 nT sensitivity
npj Flexible Electronics ( IF 14.6 ) Pub Date : 2019-02-01 , DOI: 10.1038/s41528-018-0046-9
Pablo Nicolás Granell , Guoliang Wang , Gilbert Santiago Cañon Bermudez , Tobias Kosub , Federico Golmar , Laura Steren , Jürgen Fassbender , Denys Makarov

Being a facet of flexible electronics, mechanically reshapeable magnetic field sensorics enable novel device ideas for soft robotics, interactive devices for virtual- and augmented reality and point of care diagnostics. These applications demand mechanically compliant yet robust sensor devices revealing high sensitivity to small magnetic fields. To push the detection limit of highly compliant and linear magnetic field sensors to be in the sub-µT range, we explore a new fundamental concept for magnetic field sensing, namely the planar Hall effect in magnetic thin films. With their remarkable bendability down to 1 mm, these compliant planar Hall effect sensors allow for an efficient detection of magnetic fields as small as 200 nT with a limit of detection of 20 nT. We demonstrate the application potential of these devices as a direction (angle) as well as proximity (distance) sensors of tiny magnetic fields emanating from magnetically functionalized objects. With their intrinsic linearity and simplicity of fabrication, these compliant planar Hall effect sensors have the potential to become a standard solution for low field applications of shapeable magnetoelectronics in point of care applications and on-skin interactive electronics.



中文翻译:

高度兼容的平面霍尔效应传感器,灵敏度低于200 nT

作为柔性电子学的一个方面,可机械重塑的磁场感应技术为软机器人提供了新颖的设备创意,为虚拟现实和增强现实以及医疗点诊断提供了交互式设备。这些应用需要机械兼容,但坚固耐用的传感器设备,以显示出对小磁场的高灵敏度。为了将高顺应性和线性磁场传感器的检测极限推到亚µT范围内,我们探索了一种新的磁场传感基本概念,即磁性薄膜中的平面霍尔效应。这些柔顺的平面霍尔效应传感器具有高达1 mm的卓越可弯曲性,可有效检测200 nT的磁场,而检测极限仅为20 nT。我们证明了这些设备的应用潜力,作为磁功能化物体发出的微小磁场的方向(角度)和接近度(距离)传感器。这些顺应性平面霍尔效应传感器凭借其固有的线性和制造的简便性,有可能成为就医应用和皮肤上交互式电子学在可成形磁电子学的低场应用中成为标准解决方案的潜力。

更新日期:2019-02-01
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