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Diamond epitaxy: Basics and applications
Progress in Crystal Growth and Characterization of Materials ( IF 5.1 ) Pub Date : 2016-06-01 , DOI: 10.1016/j.pcrysgrow.2016.04.017
Makoto Kasu

Abstract Diamond has been used as cutting tools, and also has recently attracted extensive attention as a semiconductor. In the review, its properties and prospects of its electronic devices are shown. Then, principles of crystal growth methods, such as high-pressure, high-temperature (HPHT) and chemical vapor deposition (CVD) methods, are described. Next, current understanding of defects such as dislocations and stacking faults is described. Further, for the future electronic applications, the present status of wafer technology and impurity doping are described. Finally, the electronic devices made of diamond semiconductors are shown.

中文翻译:

金刚石外延:基础知识和应用

摘要 金刚石作为切削工具,近来作为半导体也受到广泛关注。在评论中,展示了其电子设备的特性和前景。然后,描述了晶体生长方法的原理,例如高压、高温 (HPHT) 和化学气相沉积 (CVD) 方法。接下来,描述当前对诸如位错和堆垛层错等缺陷的理解。此外,对于未来的电子应用,描述了晶圆技术和杂质掺杂的现状。最后,展示了由金刚石半导体制成的电子设备。
更新日期:2016-06-01
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