Template-patterned, flexible transparent electrodes (TEs) formed from an ultrathin silver film on top of a commercial optical adhesive – Norland Optical Adhesive 63 (NOA63) – are reported. NOA63 is shown to be an effective base-layer for ultrathin silver films that advantageously prevents coalescence of vapor-deposited silver atoms into large, isolated islands (Volmer-Weber growth), and so aids the formation of ultrasmooth continuous films. 12 nm silver films on top of free-standing NOA63 combine high, haze-free visible-light transparency (T ≈ 60% at 550 nm) with low sheet-resistance (${\mathcal{R}}_s$ ≈ 16 Ω sq⁻¹), and exhibit excellent resilience to bending, making them attractive candidates for flexible TEs. Etching the NOA63 base-layer with an oxygen plasma before silver deposition causes the silver to laterally segregate into isolated pillars, resulting in a much higher sheet resistance (${\mathcal{R}}_s$ > 8 × 10⁶ Ω sq^-1) than silver grown on pristine NOA63 . Hence, by selectively etching NOA63 before metal deposition, insulating regions may be defined within an otherwise conducting silver film, resulting in a differentially conductive film that can serve as a patterned TE for flexible devices. Transmittance may be increased (to 79% at 550 nm) by depositing an antireflective layer of Al₂O₃ on the Ag layer at the cost of reduced flexibility.

中文翻译：

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由模板图案化薄膜银形成的柔性透明电极

据报道，模板图案化的柔性透明电极 (TE) 由商业光学粘合剂 Norland Optical Adhesive 63 (NOA63) 上的超薄银膜形成。NOA63 被证明是超薄银膜的有效基础层，可有利地防止气相沉积的银原子聚结成大的孤立岛（沃尔默-韦伯生长），从而有助于形成超光滑的连续膜。独立式 NOA63 顶部的 12 nm 银膜结合了高无雾可见光透明度（ 550 nm 时T ≈ 60%）和低薄层电阻（${\mathcal{右}}_s$≈ 16 Ω sq ^-1 )，并表现出出色的抗弯曲能力，使其成为柔性 TE 的有吸引力的候选者。在银沉积之前用氧等离子体蚀刻 NOA63 基层会导致银横向分离成孤立的柱，从而产生更高的薄层电阻（${\mathcal{右}}_s$ > 8 × 10 ⁶ Ω sq ^-1 ) 比原始 NOA63 上生长的银强。因此，通过在金属沉积之前选择性蚀刻 NOA63，可以在原本导电的银膜内限定绝缘区域，从而形成可用作柔性器件的图案化 TE 的差分导电膜。_{通过在Ag层上沉积Al 2} O ₃抗反射层可以增加透射率（在550nm处达到79%），但代价是降低了柔性。