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Mechanical characterization of thin films via constant strain rate membrane deflection experiments
Journal of the Mechanics and Physics of Solids ( IF 5.3 ) Pub Date : 2023-01-14 , DOI: 10.1016/j.jmps.2023.105209
Hojang Kim, Jae-Hoon Choi, Yuhyun Park, Sunkun Choi, Gi-Dong Sim

The mechanical behavior of freestanding metal thin films (gold, aluminum, and nickel-molybdenum-tungsten alloy) is characterized using micro-tensile testing and membrane deflection experiment (MDE). Micro-tensile and membrane samples are simultaneously fabricated on a single wafer to avoid microstructural differences. A constant strain rate MDE methodology is developed to directly compare each test method. Finite element analysis is performed to investigate potential sources of error in MDE. Specifically, the effects of in-plane and out-of-plane misalignment, tip blunting, sample dimension, and substrate deformation are studied, and physical insights gained from the analysis were applied to the experiments. By comparing with the micro-tensile tests, it is experimentally demonstrated that the stress-strain curve of freestanding metal thin films can be successfully measured via constant strain rate MDE. In particular, yield stress shows a good agreement with that obtained from micro-tensile tests, demonstrating the usefulness of applying the constant strain rate methodology in MDE testing. Furthermore, MDE enables residual stress measurements of the deposited films. Constant strain rate MDE developed in this study can serve as a useful technique for high-throughput measurement of in-plane mechanical properties of metal thin films.



中文翻译:

通过恒定应变率膜偏转实验对薄膜进行机械表征

独立金属薄膜(金、铝和镍-钼-钨合金)的机械性能使用微拉伸测试和膜偏转实验 (MDE) 进行表征。微拉伸和膜样品同时在单个晶片上制造,以避免微观结构差异。开发了一种恒定应变率 MDE 方法来直接比较每种测试方法。执行有限元分析以调查 MDE 中的潜在误差源。具体而言,研究了平面内和平面外未对准、尖端钝化、样品尺寸和基板变形的影响,并将从分析中获得的物理见解应用于实验。通过与微拉伸试验对比,实验证明,通过恒定应变率 MDE 可以成功测量独立金属薄膜的应力-应变曲线。特别是,屈服应力与从微拉伸试验获得的结果非常吻合,证明了在 MDE 测试中应用恒定应变率方法的有用性。此外,MDE 还可以测量沉积薄膜的残余应力。本研究开发的恒定应变率 MDE 可作为一种有用的技术,用于高通量测量金属薄膜的面内机械性能。MDE 可以测量沉积薄膜的残余应力。本研究开发的恒定应变率 MDE 可作为一种有用的技术,用于高通量测量金属薄膜的面内机械性能。MDE 可以测量沉积薄膜的残余应力。本研究开发的恒定应变率 MDE 可作为一种有用的技术,用于高通量测量金属薄膜的面内机械性能。

更新日期:2023-01-17
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