The laser tracker has been used as the mainstream instrument for the position accuracy calibration of industrial robots for quite a long time. However, due to the complexity of the built-in dual-axis active servo tracking system, its cost is high and the target reflector has to adjust its pose frequently, so it cannot be popularized in the production and application sites of industrial robots. Based on this drawback, a 3D passive laser tracker (3DPLT) with high precision, simple structure, easy operation and low cost is proposed in this paper. Firstly, the overall structure of the system is designed, and its position error model based on the principle of spherical coordinate measurement and vector transfer method is established. Then, the error parameters are identified by experiments to formulate the error compensation model. Finally, the multi-pose and large-range spatial error compensation verification experiments of the system are carried out on a commercial coordinate measuring machine. The results show that the spatial volumetric errors of the 3DPLT can achieve within 40 μm after compensation with a good repeatability of ±4 μm. A comparison contouring test with a commercial ballbar is also carried out to validate its applicability of robot calibration.

长期以来，激光跟踪仪作为工业机器人位置精度标定的主流仪器。但由于内置的​​双轴主动伺服跟踪系统复杂，成本高，目标反射器需要频繁调整位姿，无法在工业机器人的生产和应用现场得到推广。基于此缺点，本文提出了一种精度高、结构简单、操作方便、成本低的3D无源激光跟踪仪(3DPLT)。首先设计了系统的总体结构，建立了基于球坐标测量原理和矢量传递法的位置误差模型。然后，通过实验识别误差参数，制定误差补偿模型。最后，在商用三坐标测量机上进行了系统的多位姿大范围空间误差补偿验证实验。结果表明，3DPLT补偿后的空间体积误差可达到40 μm以内，具有±4 μm的良好重复性。还进行了与商业球杆仪的比较轮廓测试，以验证其对机器人标定的适用性。