Harnessing the full complexity of optical fields requires the complete control of all degrees of freedom within a region of space and time—an open goal for present-day spatial light modulators, active metasurfaces and optical phased arrays. Here, we resolve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (1) near-unity vertical coupling to high-finesse microcavities through inverse design; (2) scalable fabrication by optimized 300 mm full-wafer processing; (3) picometre-precision resonance alignment using automated, closed-loop ‘holographic trimming’; and (4) out-of-plane cavity control via a high-speed μLED array. Combining each, we demonstrate the near-complete spatiotemporal control of a 64 resonator, two-dimensional spatial light modulator with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space–bandwidth and time–bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.

利用光场的全部复杂性需要完全控制空间和时间区域内的所有自由度——这是当今空间光调制器、有源超表面和光学相控阵的开放目标。在这里，我们通过四个关键进步实现的可编程光子晶体腔阵列解决了这一挑战：（1）通过逆向设计接近统一的垂直耦合到高精细微腔；(2) 通过优化的 300 毫米全晶圆加工实现可扩展制造；(3) 使用自动闭环“全息修整”进行皮米级精度共振对准；(4) 通过高速 μLED 阵列进行平面外腔控制。结合每一个，我们展示了 64 个谐振器的近乎完整的时空控制，二维空间光调制器具有纳秒级和飞焦耳级切换。