Triboelectric-nano-generator (TENG) is able to produce a very small current and a large voltage compared to piezoelectric or electromagnetic generators. The large voltages from the TENGs are suitable for operating MEMS devices without external AC or DC generators. Producing micro-sized TENG using MEMS fabrication process enables integration of them with MEMS sensors and actuators. This combination is useful because the required voltage for driving MEMS is obtained from the motion of the event that is being measured. In this work, an event-driven vibration sensor is introduced which actuates a switch as the frequency or amplitude of the vibration exceeds a desired threshold. Using CMOS micromachining, a 1.5 mm × 1.5 mm TENG in contact-separation (CS) mode is fabricated to convert ambient vibrations to a voltage generated between a conductive aluminum layer and a dielectric Polyimide layer. The large generated voltage between the electrodes can operate a low-frequency electrostatic MEMS switch. Two events are able to produce the resonant dynamic pull-in needed to close the switch. Event one is when the input amplitude exceeds the dynamic pull-in threshold which is called acceleration sensitive mode. Event two is when the frequency of the vibration exceeds a specified threshold. An electromechanical model for the MEMS switch part of the vibration sensor is also presented. Results show that MEMS-TENG is able to supply the MEMS switch in the frequency sensitive and acceleration sensitive modes with a good signal-to-noise-ratio, sensitivity, and accuracy.

与压电或电磁发电机相比，摩擦纳米发电机 (TENG) 能够产生非常小的电流和大电压。TENG 的大电压适用于在没有外部交流或直流发电机的情况下操作 MEMS 设备。使用 MEMS 制造工艺生产微型 TENG 可以将它们与 MEMS 传感器和执行器集成。这种组合很有用，因为驱动 MEMS 所需的电压是从被测事件的运动中获得的。在这项工作中，引入了事件驱动的振动传感器，当振动的频率或振幅超过所需阈值时，它会启动开关。使用 CMOS 微加工，一个 1.5 mm × 1. 接触分离 (CS) 模式下的 5 mm TENG 用于将环境振动转换为导电铝层和介电聚酰亚胺层之间产生的电压。电极之间产生的大电压可以操作低频静电MEMS开关。两个事件能够产生闭合开关所需的谐振动态吸合。事件一是当输入幅度超过动态引入阈值时，称为加速度敏感模式。事件二是振动频率超过指定阈值时。还介绍了振动传感器的 MEMS 开关部分的机电模型。结果表明，MEMS-TENG 能够在频率敏感和加速度敏感模式下为 MEMS 开关提供良好的信噪比、灵敏度和精度。