We present a novel device-design methodology that produces interferometrically robust photonic integrated circuits on commercial foundry platforms. This new approach, which we call phase-injected topology optimization, leverages reciprocity to both reduce the computational load and condition the corresponding optimization problem and is compatible with existing adjoint-based design frameworks. We experimentally validate our methodology by designing, fabricating, and testing a 90° optical hybrid that operates over the C-band and occupies just 8 μm × 8 μm. We measured our device across three different wafers and observe <±7° of random variability and a net −10° systematic phase deviation between simulation and experiment across all four output arms.

中文翻译：

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可扩展且干涉测量稳健的光子集成电路的相位注入拓扑优化

我们提出了一种新颖的设备设计方法，可在商业代工平台上生产干涉测量稳健的光子集成电路。这种我们称之为相位注入拓扑优化的新方法利用互惠性来减少计算负荷和调节相应的优化问题，并且与现有的基于伴随的设计框架兼容。我们通过设计、制造和测试在 C 波段上运行且仅占 8 μm × 8 μm 的 90° 光学混合器来实验验证我们的方法。我们在三个不同的晶圆上测量了我们的设备，并观察到 ​​<±7° 的随机可变性和所有四个输出臂的模拟和实验之间的净 −10° 系统相位偏差。