In this brief, a label-free $\mathbf {3\times 3\times 2}$ three-dimensional frequency-shift biosensor array with vertically-stacked 60-GHz on-chip LC oscillators is presented. The 60-GHz LC oscillators function as sensor front-end since the frequency downward shifts due to dielectric derived from biomedical sensing targets. The proposed array element consists of the two vertically-stacked LC oscillators and 15-stage dividers necessary for extracting high-frequency output signals with a long distance. The proposed circuit was designed with Spectre RF simulation and the test chip was fabricated in 22-nm CMOS technology. The whole and element chip size is 0.04 mm2 and 0.0035 mm2 respectively. The measurement with thick and thin silicon resin samples successfully demonstrated their vertical and horizontal detection on the same chip while the prior works only achieved two-dimensional detection. The 22-nm CMOS prototype also showed high spatial resolution $60 ~\mu {\mathrm{ m}} \times 60 ~\mu {\mathrm{ m}} \times 4 ~\mu {\mathrm{ m}}$ and high fill factor 73% while consuming 4.5 mW under 1.2 V per the single-element.

中文翻译：

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使用垂直堆叠 60GHz LC 振荡器的 4.5mW 22nm CMOS 无标签频移 3 × 3 × 2 3-D 生物传感器阵列

在这个简报中，一个无标签的 $\mathbf {3\times 3\times 2}$提出了具有垂直堆叠的 60-GHz 片上 LC 振荡器的三维频移生物传感器阵列。60-GHz LC 振荡器用作传感器前端，因为由于生物医学传感目标产生的电介质导致频率向下偏移。所提出的阵列元件由两个垂直堆叠的 LC 振荡器和 15 级分频器组成，这是提取长距离高频输出信号所必需的。所提出的电路采用 Spectre RF 仿真设计，测试芯片采用 22-nm CMOS 技术制造。整体和元件芯片尺寸分别为0.04 mm2和0.0035 mm2。对厚薄硅树脂样品的测量成功地证明了它们在同一芯片上的垂直和水平检测，而之前的工作只能实现二维检测。 $60 ~\mu {\mathrm{ m}} \times 60 ~\mu {\mathrm{ m}} \times 4 ~\mu {\mathrm{ m}}$和 73% 的高填充因子，同时每个单元在 1.2 V 下消耗 4.5 mW。