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Erratum to: Application of the Tikhonov Regularization Method in Problems of Ellipsometic Porometry of Low-K Dielectrics
Russian Microelectronics Pub Date : 2022-09-08 , DOI: 10.1134/s1063739722550017 R. A. Gaidukasov , A. V. Myakon’kikh , K. V. Rudenko
中文翻译：
勘误表：Tikhonov 正则化方法在低 K 电介质椭圆体孔隙率问题中的应用
更新日期：2022-09-09
Russian Microelectronics Pub Date : 2022-09-08 , DOI: 10.1134/s1063739722550017 R. A. Gaidukasov , A. V. Myakon’kikh , K. V. Rudenko
An Erratum to this paper has been published: https://doi.org/10.1134/S1063739722550017
中文翻译：
勘误表：Tikhonov 正则化方法在低 K 电介质椭圆体孔隙率问题中的应用
本文的勘误表已发布：https://doi.org/10.1134/S1063739722550017
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