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Magnetic Permeability of Co–Ni–Fe Alloy Films Obtained by Electrochemical Deposition
Russian Microelectronics Pub Date : 2022-09-08 , DOI: 10.1134/s1063739722050109
R. D. Tikhonov, A. A. Cheremisinov, M. R. Tikhonov

Abstract

The magnetic properties of films of the Co–Ni–Fe alloy, fabricated by the technology of local electrochemical deposition from a chloride electrolyte, are studied. The dependences of magnetization on the deposition mode, electrolyte composition, and deposition time are determined. It is established that the use of Co–Ni–Fe alloy films with an iron content of 14 to 16% makes it possible to optimize the magnetization characteristics to amplify weak magnetic signals. In magnetic-semiconductor microsystems, Co–Ni–Fe alloy films are used for magnetic field concentrators, which increase the sensitivity of the system.



中文翻译:

电化学沉积法获得的Co-Ni-Fe合金薄膜的磁导率

摘要

研究了采用氯化物电解质局部电化学沉积技术制备的 Co-Ni-Fe 合金薄膜的磁性。确定了磁化对沉积模式、电解质成分和沉积时间的依赖性。已经确定,使用铁含量为 14% 至 16% 的 Co-Ni-Fe 合金薄膜可以优化磁化特性以放大弱磁信号。在磁半导体微系统中,Co-Ni-Fe合金薄膜用于磁场集中器,从而提高了系统的灵敏度。

更新日期:2022-09-09
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