The characteristics and formation mechanism of V-shaped groove formed by laser-activated metallization of aluminum nitride (AlN) ceramic under different shielding gas environments of air, nitrogen, and argon are investigated, using a novel analysis way which is based on the intensity distribution of the focused laser beam. It is found that the width of the V-shaped groove is slightly different under different gas environments, and the depth of the V-shaped groove is nearly the same, which means that the energy thresholds required for laser decomposition of AlN ceramic are different in various gas environments: air > nitrogen > argon, and the energy required for laser etching AlN ceramic is the same. It is also found that the nonlinearity in the curves of depth and width versus different machining parameters, which are explained in detail.

中文翻译：

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激光参数和气氛对氮化铝结构化的影响

采用基于强度分布的新型分析方法，研究了在空气、氮气、氩气等不同保护气体环境下，氮化铝（AlN）陶瓷激光活化金属化形成V型槽的特征及形成机理。的聚焦激光束。发现不同气体环境下V型槽的宽度略有不同，而V型槽的深度几乎相同，说明AlN陶瓷激光分解所需的能量阈值不同。各种气体环境：空气>氮气>氩气，激光蚀刻AlN陶瓷所需能量相同。还发现了深度和宽度曲线与不同加工参数的非线性关系，对此进行了详细解释。