This paper presents the simulation results as well as calculated results of a proposed RF MEMS shunt switch with Electro-mechanical modelling and stress gradient characteristics. The analysis is done with three membrane structures such as plane beam, incorporated with and without perforations, and non-uniform meander type beam, these are simulated in the COMSOL Multi-physics tool. The various model analysis are carried out for different values of residual stress gradients such as different structures, materials, and beam thickness. The analysis are characterized that the higher values of stress gradient are not desirable for switching action. By analyzing all the results we have observed that the stress analysis for the non-uniform meandered type switch obtained maximum stress of 35.6 MPa, and center deflection of 0.06 MPa/μm, the deformations of the beam which is the least among the considered switches.

本文介绍了一种具有机电建模和应力梯度特性的射频 MEMS 并联开关的仿真结果和计算结果。分析是使用三种膜结构完成的，例如平面梁（包含和不包含穿孔）和非均匀曲折型梁，这些都在 COMSOL Multi-physics 工具中进行了模拟。针对不同的残余应力梯度值（例如不同的结构、材料和梁厚度）进行各种模型分析。该分析的特点是，较高的应力梯度值对于开关动作来说是不可取的。通过分析所有结果，我们观察到非均匀曲折型开关的应力分析获得了 35.6 MPa 的最大应力和 0.06 MPa/μm 的中心挠度，