The paper presents the design and technological fabrication process of Yin or Yang-shaped, micron-sized electromechanical system (MEMS) elements displaying asymmetric hollow cylinders with two different curvatures of the cylinder shell. By adapting the process steps, two neighboring shutter MEMS elements can either be attached to each other to create asymmetric hollow cylinders or remain disconnected to form curled cylindrical or ellipsoidal tubes or tube fractions. A novel 3D self-organization process has been developed to connect two neighboring shutter elements, exploiting surface tension forces via a sequential drying process. The process conditions have been analyzed and optimized to fabricate the two different geometries of the MEMS elements. The resulting MEMS system elements were characterized by focused ion beam and scanning electron microscopy. The contribution of Casimir force, van der Waals force, and other physical interfacial forces are discussed in the formation of the asymmetric hollow cylinders.

本文介绍了阴或阳形、微米级机电系统 (MEMS) 元件的设计和技术制造过程，该元件显示了具有两种不同曲率圆柱壳的不对称空心圆柱体。通过调整工艺步骤，两个相邻的快门 MEMS 元件可以相互连接以形成不对称的空心圆柱体，或者保持断开连接以形成卷曲的圆柱形或椭圆形管或管部分。已经开发出一种新颖的 3D 自组织过程来连接两个相邻的快门元件，通过顺序干燥过程利用表面张力。工艺条件已经过分析和优化，以制造 MEMS 元件的两种不同几何形状。由此产生的 MEMS 系统元件通过聚焦离子束和扫描电子显微镜进行表征。讨论了卡西米尔力、范德华力和其他物理界面力在不对称空心圆柱体形成中的作用。