Transition-edge sensors (TES) are remarkable superconducting devices for a wide range of radiation detection with the ability of both energy resolution and counting photons. For the detection of single photons at telecom wavelength, optical Ti/Au bilayer TESs are fabricated and characterized. The superconducting transition temperature (T_c) of the Ti/Au films is effectively tuned from 162 to 72 mK by increasing the relative thickness ratio between the Au and Ti layer. The sensitive area is 20 μm × 20 μm, on which an SiO₂/SiN_x antireflection structure is coated by an ICP-PECVD process. The TES device shows an energy resolution of 0.19 eV and can discriminate up to 36 incident photons, with an effective time constant around 107 µs at 95 mK.

过渡边缘传感器 (TES) 是一种卓越的超导器件，可用于广泛的辐射检测，具有能量分辨率和光子计数能力。为了检测电信波长的单光子，制造并表征了光学 Ti/Au 双层 TES。通过增加 Au 和 Ti 层之间的相对厚度比，Ti/Au 薄膜的超导转变温度 ( _Tc )从 162 mK 有效调整到 72 mK。敏感区域为 20 μm × 20 μm，其上通过 ICP-PECVD 工艺涂覆 SiO ₂ /SiN _x抗反射结构。TES 设备显示出 0.19 eV 的能量分辨率，可以区分多达 36 个入射光子，在 95 mK 时有效时间常数约为 107 µs。