A mathematical model has been proposed and verified, based on the combination of thermodynamic calculations of equilibrium plasma and CFD-modeling of the plasma-chemical reactor for hydrogen recovery of volatile halides. An experimental study of the hydrogen reduction processes of BCl₃ and SiCl₄ was carried out under conditions of RF-IC (RF inductively coupled) discharge at atmospheric pressure. Based on the experimental results, the developed mathematical model was validated. A series of numerical experiments on parametric study of gas dynamics of high-frequency plasmatron with vortex stabilization of flow for various hydrogen concentrations in argon-hydrogen plasma-forming mixture was carried out. Thermodynamic calculations and CFD modeling were made for input into the reaction chamber of chemically active gas mixtures (BCl₃ + H₂), (BF₃ + H₂), (SiCl₄ + H₂), (SiF₄ + H₂), (MoF₆ + H₂), (WF₆ + H₂), (BCl₃ + CH₄ + H₂), (BF₃ + CH₄ + H₂), (SiF₄ + CH₄ + H₂), (MoF₆ + CH₄ + H₂) and (WF₆ + CH₄ + H₂). The values for the predictive efficiency and the degree of conversion of target products were obtained.

基于平衡等离子体的热力学计算和等离子体化学反应器的 CFD 建模相结合，用于挥发性卤化物的氢气回收，提出并验证了一个数学模型。_{BCl 3}和SiCl ₄氢还原过程的实验研究在大气压下的RF-IC（RF感应耦合）放电条件下进行。在实验结果的基础上，对所建立的数学模型进行了验证。对氩氢等离子体形成混合物中不同氢浓度的高频等离子管气体动力学参数研究进行了一系列数值实验。_{对化学活性气体混合物（BCl 3} + H ₂）、（BF ₃ + H ₂）、（SiCl ₄ + H ₂）、（SiF ₄ + H ₂ ）的输入反应室进行热力学计算和 CFD 建模， (MoF ₆ + H ₂), (WF ₆ + H ₂ ), (BCl ₃ + CH ₄ + H ₂ ), (BF ₃ + CH ₄ + H ₂ ), (SiF ₄ + CH ₄ + H ₂ ), (MoF ₆ + CH ₄ + H ₂）和（WF ₆ + CH ₄ + H ₂）。获得了目标产品的预测效率和转化程度的值。