Two-dimensional molybdenum disulfide (MoS₂) has attracted significant attention for next-generation electronics, flexible devices, and optical applications. Chemical vapor deposition is the most promising route for the production of large-scale, high-quality MoS₂ films. Recently, the chemical vapor deposition of MoS₂ films on soda-lime glass has attracted great attention due to its low cost, fast growth, and large domain size. Typically, a piece of Mo foil or graphite needs to be used as a buffer layer between the glass substrates and the CVD system to prevent the glass substrates from being fragmented. In this study, a novel method was developed for synthesizing MoS₂ on glass substrates. Inert Al₂O₃ was used as the buffer layer and high-quality, uniform, triangular monolayer MoS₂ crystals with domain sizes larger than 400 μm were obtained. To demonstrate the advantages of glass/Al₂O₃ substrates, a direct comparison of CVD MoS₂ on glass/Mo and glass/Al₂O₃ substrates was performed. When Mo foil was used as the buffer layer, serried small bilayer islands and bright core centers could be observed on the MoS₂ domains at the center and edges of glass substrates. As a control, uniform MoS₂ crystals were obtained when Al₂O₃ was used as the buffer layer, both at the center and the edge of glass substrates. Raman and PL spectra were further characterized to show the merit of glass/Al₂O₃ substrates. In addition, the thickness of MoS₂ domains was confirmed by an atomic force microscope and the uniformity of MoS₂ domains was verified by Raman mapping. This work provides a novel method for CVD MoS₂ growth on soda-lime glass and is helpful in realizing commercial applications of MoS₂.

中文翻译：

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玻璃/Al2O3 基板上均匀大域二硫化钼晶体的化学气相沉积

二维二硫化钼（MoS ₂）在下一代电子产品、柔性器件和光学应用中引起了极大的关注。化学气相沉积是生产大规模、高质量MoS ₂薄膜的最有希望的途径。近年来，在钠钙玻璃上化学气相沉积MoS ₂薄膜由于其成本低、生长快、畴尺寸大而引起了人们的广泛关注。通常，需要使用一块钼箔或石墨作为玻璃基板和 CVD 系统之间的缓冲层，以防止玻璃基板碎裂。在这项研究中，开发了一种在玻璃基板上合成 MoS _{2的新方法。}惰性Al ₂ O_以3作为缓冲层，获得了畴尺寸大于400μm的高质量、均匀的三角形单层MoS _2晶体。为了证明玻璃/Al 2 O 3 基板的优势，_对玻璃/Mo 和玻璃/Al 2 O ₃基板上_的CVD _MoS 2 进行了直接_比较。当Mo箔用作缓冲层时，在玻璃基板中心和边缘的MoS _{2畴上可以观察到串联的小双层岛和明亮的核心中心。}作为对照，_当Al ₂ O ₃被用作缓冲层，在玻璃基板的中心和边缘。进一步表征拉曼和PL光谱以显示玻璃/Al ₂ O ₃基板的优点。此外，通过原子力显微镜确认了MoS ₂畴的厚度，并通过拉曼映射验证了MoS _{2畴的均匀性。该工作为钠钙玻璃上CVD MoS 2}的生长提供了一种新的方法，有助于实现MoS ₂的商业应用。