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Effect of the Pulse Phase Shift of an External Magnetic Field Upon Coating Deposition by Electrical Explosion
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2022-08-03 , DOI: 10.1134/s102745102204005x
G. P. Gololobov , A. N. Vlasov , M. V. Dubkov , D. V. Suvorov , E. V. Slivkin , M. S. Tishchenko

We consider the features of the deposition of a copper coating on a nickel substrate by the method of the electrical explosion of a foil in an external pulsed magnetic field. Investigations of the effect of the phase shift of the external magnetic-field pulse with respect to the moment of explosion on the morphology of the resulting coating are carried out. Deposition is carried out on the modernized experimental unit “INGIR-Mega-15” for five different conditions: the explosion occurred 100 μs before application of the magnetic-field pulse; it happened simultaneously with application of the magnetic-field pulse; at the middle of the leading edge of the pulse, at the maximum of the pulse, and at the middle of the rear edge of the pulse. The effect of the magnetic-field-pulse phase shift relative to the moment of explosion on the rate of the formation and decay of the plasma cloud is established. It is shown that the application of a magnetic field at the moment corresponding to the phase of the vapor-gas condensate promotes a more uniform distribution of copper drops over the wafer and a change in their shape.



中文翻译:

外磁场脉冲相移对电爆炸镀层的影响

我们通过箔在外部脉冲磁场中的电爆炸的方法考虑在镍基底上沉积铜涂层的特征。研究了外部磁场脉冲的相移相对于爆炸时刻对所得涂层形态的影响。在现代化的实验装置“INGIR-Mega-15”上针对五种不同条件进行沉积:在施加磁场脉冲前 100 μs 发生爆炸;它与磁场脉冲的应用同时发生;在脉冲前沿的中间、脉冲的最大值和脉冲的后沿的中间。建立了磁场脉冲相移相对于爆炸时刻对等离子体云的形成和衰减速率的影响。结果表明,在对应于蒸汽-气体冷凝物相的时刻施加磁场促进了铜滴在晶片上的更均匀分布并改变了它们的形状。

更新日期:2022-08-04
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