Microwave technology has emerged as an appealing alternative for building humidity sensors with multiple detection parameters. This paper demonstrates the one-step laser direct writing fabrication of microwave humidity sensors. Silver nanoplates were used as both the humidity-sensitive material and a precursor to highly conductive Ag electrodes. Particularly, the unirradiated silver nanoplates film shows an unusual lossy dielectric nature, with the effective complex dielectric permittivity being dramatically tuned by humidity stimuli. Through a laser-induced sintering mechanism, laser irradiation bursts the conductivity by approximately 10 orders of magnitude with a maximum conductivity value of 9.7 × 10⁶ S/m. A prototype microwave humidity sensor is designed and fabricated and its humidity sensing performances are comparatively studied and discussed. The measured results show that the sensor displays a high humidity sensitivity of up to 12.61 MHz/RH or 0.288 dB/RH. This work suggests a good candidate approach for the realization of high-performance microwave humidity sensors with a fast and simplified advantage.

微波技术已成为构建具有多个检测参数的湿度传感器的一种有吸引力的替代方案。本文演示了微波湿度传感器的一步激光直写制造。银纳米板被用作湿度敏感材料和高导电银电极的前体。特别是，未经辐照的银纳米片薄膜表现出不寻常的有损介电性质，其有效的复介电常数可通过湿度刺激显着调整。通过激光诱导的烧结机制，激光照射使电导率提高了大约 10 个数量级，最大电导率值为 9.7 × 10 ⁶米/米。设计并制作了原型微波湿度传感器，并对其湿度传感性能进行了比较研究和讨论。测量结果表明，该传感器具有高达 12.61 MHz/RH 或 0.288 dB/RH 的高湿度灵敏度。这项工作为实现具有快速和简化优势的高性能微波湿度传感器提供了一种很好的候选方法。