Abstract

The results of the research and analysis of wave acoustic processes in piezoelectric substrates based on the solution of wave equations of piezoacoustics by the finite element method are presented. A description of the test structures and the algorithm of the work in the COMSOL Multiphysics environment are given. Three main approaches are considered: in the region of eigenfrequencies, in the given frequency range, and in the time domain. The properties and parameters of widely used surface acoustic waves are analyzed. The visualization of a number of characteristics is presented. The phase velocity of the wave and the electromechanical coupling coefficient are calculated. It is shown that the data obtained as a result of numerical analysis correspond to the data from known sources. The results of the calculation and experimental measurements of the transmission coefficient are compared using the example of a delay line and a resonator filter.

中文翻译：

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使用 COMSOL 对声表面波器件进行有限元建模

摘要

介绍了基于有限元法求解压电声学波动方程的压电基板中波声过程的研究和分析结果。给出了在 COMSOL Multiphysics 环境中的测试结构和工作算法的描述。考虑了三种主要方法：在特征频率区域内、在给定频率范围内和在时域内。分析了广泛使用的表面声波的特性和参数。呈现了许多特征的可视化。计算波的相速度和机电耦合系数。结果表明，作为数值分析的结果获得的数据与已知来源的数据相对应。