In this paper, a voice coil motor (VCM) that generates a constant upward force over a working range without excitation where the magnitude of the force is matched to the that of the payload on the armature of the VCM is presented. As a result, the VCM does not consume energy to support the payload. It minimizes the thermal expansion by Joule heating and improves the accuracy of the semiconductor equipment. The developed VCM comprises two permanent magnets, a coil winding, a stator, and an armature. The armature is made of a ferromagnetic material and generates two magnetic forces by two magnetic reluctances. The armature is shaped to maintain the sum of the two magnetic forces over its working range. The armature was designed using finite element and design parameter analyses, and the final design that satisfied the design requirements was attained. The prototype of the VCM was manufactured, and its performance was verified experimentally. It generated a constant upward force (20.9 N) over its working range (4.5 mm) without excitation. The dynamic response to step inputs for 240 nm/step was measured, and it was verified that current flowed only when the armature moved; the armature remained vertically stationary without excitation.

在本文中，提出了一种音圈电机 (VCM)，它在没有激励的情况下在工作范围内产生恒定的向上力，其中力的大小与 VCM 电枢上的有效载荷的大小相匹配。因此，VCM 不消耗能量来支持有效载荷。它最大限度地减少了焦耳加热引起的热膨胀，并提高了半导体设备的精度。开发的 VCM 包括两个永磁体、一个线圈绕组、一个定子和一个电枢。衔铁由铁磁材料制成，通过两个磁阻产生两个磁力。衔铁的形状可以在其工作范围内保持两个磁力的总和。使用有限元和设计参数分析设计电枢，达到了满足设计要求的最终设计。制作了 VCM 样机，并对其性能进行了实验验证。它在其工作范围 (4.5 mm) 内产生恒定的向上力 (20.9 N)，无需激发。测量了 240 nm/步对步进输入的动态响应，并验证了电流仅在电枢移动时流动；电枢在没有激励的情况下保持垂直静止。