Flexible in-plane architecture micro-supercapacitors (MSCs) are competitive candidates for on-chip miniature energy storage applications owing to their light weight, small size, high flexibility, as well as the advantages of short charging time, high power density, and long cycle life. However, tedious and time-consuming processes are required for the manufacturing of high-resolution interdigital electrodes using conventional approaches. In contrast, the laser processing technique enables high-efficiency high-precision patterning and advanced manufacturing of nanostructured electrodes. In this review, the recent advances in laser manufacturing and patterning of nanostructured electrodes for applications in flexible in-plane MSCs are comprehensively summarized. Various laser processing techniques for the synthesis, modification, and processing of interdigital electrode materials, including laser pyrolysis, reduction, oxidation, growth, activation, sintering, doping, and ablation, are discussed. In particular, some special features and merits of laser processing techniques are highlighted, including the impacts of laser types and parameters on manufacturing electrodes with desired morphologies/structures and their applications on the formation of high-quality nanoshaped graphene, the selective deposition of nanostructured materials, the controllable nanopore etching and heteroatom doping, and the efficient sintering of nanometal products. Finally, the current challenges and prospects associated with the laser processing of in-plane MSCs are also discussed. This review will provide a useful guidance for the advanced manufacturing of nanostructured electrodes in flexible in-plane energy storage devices and beyond.

中文翻译：

---

柔性面内微型超级电容器的激光加工：纳米结构电极的先进制造进展

柔性面内结构微型超级电容器（MSCs）具有重量轻、体积小、灵活性高、充电时间短、功率密度高、续航时间长等优点，是片上微型储能应用的有竞争力的候选者。循环寿命。然而，使用传统方法制造高分辨率叉指电极需要繁琐且耗时的过程。相比之下，激光加工技术可实现纳米结构电极的高效高精度图案化和先进制造。在这篇综述中，全面总结了激光制造和纳米结构电极图案化在柔性面内 MSC 中应用的最新进展。各种激光加工技术用于合成、修饰、讨论了叉指电极材料的激光热解、还原、氧化、生长、活化、烧结、掺杂和烧蚀等加工工艺。特别强调了激光加工技术的一些特点和优点，包括激光类型和参数对制造具有所需形貌/结构的电极的影响及其在高质量纳米石墨烯形成、纳米结构材料选择性沉积等方面的应用，可控的纳米孔刻蚀和杂原子掺杂，以及纳米金属产品的高效烧结。最后，还讨论了与面内 MSC 激光加工相关的当前挑战和前景。