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Study of the surface topography and optical properties of ZnO and AZO, CZO, and CAZO thin films (in room temperature and annealed at 500 °C)
Molecular Crystals and Liquid Crystals ( IF 0.7 ) Pub Date : 2022-06-30 , DOI: 10.1080/15421406.2022.2092371
Nasim Rahimi 1 , Vali Dalouji 1
Affiliation  

Abstract

In this paper, using a sputtering technique, ZnO, and AZO, CZO, and CAZO films at room temperature (RT) were prepared and then they were annealed at 500 °C in an argon atmosphere. In as deposited films, CZO films have maximum value and for films annealed at 500 °C, CZO films have maximum value the optical density. It is found that the CAZO films have maximum value cavity obtained from the bearing area. Due to decreasing oxygen vacancies in the CAZO films, x–y fluctuations in these films have minimum value. The distributions of nanoparticles on the CAZO films annealed at 500 °C were more uniformity. The CZO films were more order. We observed that the edge absorption energy in the CAZO films annealed at 500 °C have maximum value. Average oscillator wavelength λo in the CAZO films annealed at 500 °C have minimum value of 0.09 μm.



中文翻译:

ZnO 和 AZO、CZO 和 CAZO 薄膜的表面形貌和光学性质研究(室温和 500 °C 退火)

摘要

在本文中,使用溅射技术,在室温 (RT) 下制备了 ZnO、AZO、CZO 和 CAZO 薄膜,然后将它们在 500 °C 的氩气气氛中退火。在沉积薄膜中,CZO 薄膜具有最大值,对于在 500 °C 退火的薄膜,CZO 薄膜具有最大值光密度。结果发现,CAZO 薄膜具有从轴承区域获得的最大值空腔。由于 CAZO 薄膜中氧空位的减少,这些薄膜中的 x-y 波动具有最小值。500℃退火后的CAZO薄膜上纳米粒子的分布更加均匀。CZO 的电影更有条理。我们观察到在 500 °C 退火的 CAZO 薄膜中的边缘吸收能量具有最大值。平均振荡器波长 λ o在 500 °C 退火的 CAZO 薄膜中,最小值为 0.09 μm。

更新日期:2022-06-30
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