To meet the growing demand for photonic integration and device miniaturization, planar diffractive Fresnel zone plates (FZPs) are widely applied in integrated optical systems. However, challenges remain in fabricating FZPs with high efficiency and satisfying the requirement for cross-scale fabrication. This paper details a high efficiency method for fabricating ultrathin FZPs of different scales on metal films by using holographic femtosecond lasers. The FZPs are split into a series of element patterns that are printed in order by using corresponding modulated femtosecond pulses. The fabricated FZPs are spliced by the printed element structures with no FZP size limitation in theory. FZPs with an area varying across three orders of magnitude are presented to demonstrate the capability of cross-scale fabrication. The fabricated FZPs possess an excellent broadband focusing and imaging ability in the visible spectrum. Furthermore, the fabrication of other functional ultrathin lenses, such as axial multifocal zone plates, petal-like zone plates, and FZP arrays, is described, revealing the wide potential for the flexible and scalable fabrication method in on-chip integrated optical systems.

中文翻译：

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使用全息飞秒脉冲高效和可扩展地制造菲涅耳波带板

为了满足对光子集成和器件小型化日益增长的需求，平面衍射菲涅耳波带板（FZP）被广泛应用于集成光学系统中。然而，在高效制造 FZP 并满足跨尺度制造要求方面仍然存在挑战。本文详细介绍了一种利用全息飞秒激光器在金属薄膜上制备不同尺度超薄 FZP 的高效方法。FZP 被分成一系列元素图案，这些图案通过使用相应的调制飞秒脉冲按顺序打印。制造的 FZP 由印刷元件结构拼接而成，理论上没有 FZP 尺寸的限制。展示了面积在三个数量级之间变化的 FZP，以展示跨尺度制造的能力。制造的 FZP 在可见光谱中具有出色的宽带聚焦和成像能力。此外，还描述了其他功能性超薄透镜的制造，例如轴向多焦点波带片、花瓣状波带片和 FZP 阵列，揭示了片上集成光学系统中灵活且可扩展的制造方法的广泛潜力。