Abstract. A method of tapering waveguides using fixed-electronic-beam-moving-stage (FBMS) paths is presented. The tapering is achieved by joining two FBMS paths to a common point. Compared to conventional area and FBMS tapering methods, the proposed method offers smooth and alignment-error-free tapering between waveguides of different widths. We experimentally demonstrate a fully functional FBMS patterned photonic circuit with a power splitter, wire-to-slot coupler, slot waveguide, and a slotted ring resonator. The device response with an insertion loss of −1.35  dB is measured around 1550-nm wavelength.

中文翻译：

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使用固定束移动台电子束光刻制造锥形波导的方法

摘要。提出了一种使用固定电子束移动台 (FBMS) 路径使波导变细的方法。通过将两条 FBMS 路径连接到一个公共点来实现渐缩。与传统的面积和 FBMS 锥形方法相比，所提出的方法在不同宽度的波导之间提供了平滑且无对准误差的锥形。我们通过实验演示了一个功能齐全的 FBMS 图案化光子电路，该电路具有功率分配器、线到槽耦合器、槽波导和开槽环形谐振器。插入损耗为 -1.35 dB 的器件响应在 1550 nm 波长附近测量。