Frequency comb in microelectromechanical systems has attracted many concerns, which is expected to realize great achievements analogous with the optical frequency comb. Previous frequency combs are generated by mode coupling in a single micro-resonator. To pursuit more excellent tunability and robustness, it is impending to create a frequency comb through another way, i.e., coupled but relatively independent micro-resonators. In this work, a frequency comb in 1:3 internal resonance region of an electrostatically coupled microsystem is reported. We demonstrate the occurrence conditions and its influencing factors of the frequency comb. A dynamical explanation, which has good agreement with the experimental results, is presented to further reveal its intrinsic mechanism. Our finding provides a controllable method to produce a frequency comb that is beneficial to potential applications, such as signal processing and sensing sensitivity enhancement.

中文翻译：

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耦合微机械谐振器 1:3 内谐振中的频率梳

微机电系统中的频率梳引起了很多关注，有望实现与光学频率梳类似的巨大成就。以前的频率梳是通过单个微谐振器中的模式耦合生成的。为了追求更优异的可调谐性和鲁棒性，通过另一种方式创建频率梳迫在眉睫，即耦合但相对独立的微谐振器。在这项工作中，报告了静电耦合微系统的 1:3 内部共振区域中的频率梳。我们论证了频率梳的发生条件及其影响因素。提出了与实验结果非常吻合的动力学解释，以进一步揭示其内在机制。