An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 μm^–1 which is increased by about 21%, compared with the conventional structure.

中文翻译：

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带肋形波导的集成光机械悬臂梁传感器

本文报道了一种带有肋形波导的集成光机悬臂梁传感器。该装置由一个肋形波导悬臂组成，在硅上埋有波导。引入肋状悬臂梁以更好地与埋入式波导匹配，进一步提高界面耦合效率。通过这种配置，可以在横向实现单模操作，而不会减小光波导悬臂的宽度。系统灵敏度为1.1 μm ^–1，与传统结构相比提高了约21%。