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Fabrication and calibration of nanostructured vanadium-doped ZnO-based micromachined sensor with superior sensitive for underwater acoustic measurement
Journal of Micromechanics and Microengineering ( IF 2.3 ) Pub Date : 2021-12-06 , DOI: 10.1088/1361-6439/ac3b8c
Wei Gao 1 , Yu Zhang 1 , Binghe Ma 1 , Jian Luo 1 , Jinjun Deng 1
Affiliation  

A high-performance micromachined piezoelectric sensor based nanostructured vanadium-doped zinc oxide (ZnO) film with air-backing has been developed and characterized for underwater acoustic application. The sensing cell with a low foot-print of 2.0 mm × 2.0 mm is fabricated by Micro electro mechanical systems (MEMS) technology using a ZnO-on-silicon-on-insulator process platform. An optimal ratio of piezoelectric coefficient to the relative permittivity is obtained about 6.3 in the Zn0.98V0.02O sensing cell, improving by an order of magnitude compared with other notable piezoelectric films, plays a mainly dominant role in the enhanced piezoelectric response. Calibrations in the standard underwater instrument have demonstrated that the presented sensor could achieve an acoustic pressure sensitivity of −165 ± 2 dB (1 V μPa−1) over a bandwidth 10 Hz–10 kHz, outperforming the same kind of reported devices. The maximum non-linearity is no more than 0.3%, the sensitivity variation is no more than ±0.7 dB in the temperature range from 10 °C to 50 °C, indicating a better stability and higher reliability. The proposed sensor with a superior acoustic sensitivity gives a great application potential in underwater acoustic measurements.

中文翻译:

具有优异水声测量灵敏度的纳米结构钒掺杂 ZnO 基微机械传感器的制造和校准

已经开发出一种基于纳米结构钒掺杂氧化锌 (ZnO) 薄膜的高性能微机械压电传感器,并针对水声应用进行了表征。具有 2.0 mm × 2.0 mm 低尺寸的传感单元是通过微机电系统 (MEMS) 技术使用绝缘体上硅上氧化锌工艺平台制造的。在 Zn 0.98 V 0.02中,压电系数与相对介电常数的最佳比约为 6.3与其他著名的压电薄膜相比,O 传感单元提高了一个数量级,在增强的压电响应中起主要作用。标准水下仪器的校准表明,所提出的传感器可以实现 -165 ± 2 dB (1 VμPa -1 ) 在 10 Hz–10 kHz 的带宽上,优于报告的同类设备。最大非线性不超过0.3%,在10°C至50°C温度范围内灵敏度变化不超过±0.7dB,稳定性和可靠性更高。所提出的具有卓越声学灵敏度的传感器在水下声学测量中具有巨大的应用潜力。
更新日期:2021-12-06
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