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Marker-free stitching deflectometry for three-dimensional measurement of the specular surface
Optics Express ( IF 3.8 ) Pub Date : 2021-12-01 , DOI: 10.1364/oe.444205
Ruiyang Wang , Dahai Li , Xinwei Zhang , Wanxing Zheng , Linzhi Yu , Renhao Ge

Due to the ‘invisible’ property of the specular surface, it is difficult for the stitching deflectometry to identify the overlapping area. Previously, markers were used on the unit under test with a roughly known shape to find the overlapping area. We propose a marker-free stitching deflectometry that utilizes the stereo-iterative algorithm to calculate the sub-aperture point cloud without height-slope ambiguity, and the overlapping area is identified with the point cloud datum. The measured area is significantly enlarged. The simulation and experiments are conducted to verify the proposal and evaluate the accuracy. We test a high-quality flat with 190mm diameter, the measurement error is below 100nm RMS with comparison to the interferometer.

中文翻译:

用于镜面三维测量的无标记拼接挠度法

由于镜面的“不可见”特性,拼接偏转测量法很难识别重叠区域。以前,在被测单元上使用具有大致已知形状的标记来查找重叠区域。我们提出了一种无标记拼接偏转测量法,它利用立体迭代算法计算没有高度-斜率模糊的子孔径点云,并用点云数据识别重叠区域。测量区域显着扩大。进行模拟和实验以验证该建议并评估准确性。我们测试了一个直径为 190mm 的高质量平面,与干涉仪相比,测量误差低于 100nm RMS。
更新日期:2021-12-06
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