Co₆₀Fe₂₀Y₂₀ film was sputtered on glass substrate with a 10 nm to 50 nm under four annealed conditions and the structure, magnetic properties, surface energy, and optical property were examined. An amorphous structure of CoFeY films was revealed by an X-ray diffraction analyzer, suggesting that the addition of yttrium (Y) refined the grain size and the annealing temperatures were insufficient to support grain growth. The saturation magnetization (Ms) and low-frequency alternate-current magnetic susceptibility (χ_ac) increased with the increase in the thicknesses and annealing temperatures, suggesting that the thickness effect and Y can refine grain size and induce ferromagnetic spin exchange coupling. The highest Ms and χ_ac of Co₆₀Fe₂₀Y₂₀ film were 735 emu/cm³ and 0.23 at an annealing temperature of 300 °C and 50 nm. The χ_ac value of CoFeY film decreased significantly with the increase in measured frequency, while the maximum χ_ac value increased significantly after heat treatment. The optimal resonance frequency (f_res) corresponding to the maximum χ_ac was 50 Hz, indicating the applicability of the film in a low-frequency range. The highest surface energy of the 50 nm was 31.84 mJ/mm² at 300 °C, while the highest transmittance 58% was observed in as-deposited 10 nm film. The transmittance decreased with the increase in annealing temperatures and thickness. A higher thickness may inhibit photon signal transfer through the film, causing a low transmittance. Moreover, the specific properties of Co₆₀Fe₂₀Y₂₀ films are compared with Co₄₀Fe₄₀B₁₀Y₁₀ films, which indicate that Co₆₀Fe₂₀Y₂₀ films have high maximum χ_ac, surface energy, and transmittance than Co₄₀Fe₄₀B₁₀Y₁₀ films.

Co ₆₀ Fe ₂₀ Y ₂₀薄膜在4种退火条件下溅射在10nm至50nm的玻璃基板上，并检查其结构、磁性能、表面能和光学性能。X 射线衍射分析仪揭示了 CoFeY 薄膜的无定形结构，这表明添加钇 (Y) 细化了晶粒尺寸，并且退火温度不足以支持晶粒生长。饱和磁化强度（Ms）和低频交流磁化率（χ _ac）随着厚度和退火温度的增加而增加，表明厚度效应和 Y 可以细化晶粒尺寸并诱导铁磁自旋交换耦合。最高的 Ms 和 χCo ₆₀ Fe ₂₀ Y ₂₀膜的_ac在300℃和50nm的退火温度下为735emu/cm ³和0.23。CoFeY薄膜的χ _ac值随着测量频率的增加而显着降低，而热处理后的最大χ _ac值显着增加。对应于最大 χ _ac的最佳共振频率 (f _res )为 50 Hz，表明该薄膜在低频范围内的适用性。50 nm 的最高表面能为 31.84 mJ/mm ²在 300 °C 时，在沉积的 10 nm 薄膜中观察到最高透光率 58%。透射率随着退火温度和厚度的增加而降低。较高的厚度可能会抑制光子信号通过薄膜的传输，从而导致低透射率。此外，将Co ₆₀ Fe ₂₀ Y ₂₀薄膜的具体性能与Co ₄₀ Fe ₄₀ B ₁₀ Y ₁₀薄膜进行了比较，表明Co ₆₀ Fe ₂₀ Y ₂₀薄膜具有比Co ₄₀高的最大χ _ac、表面能和透射率铁₄₀ B ₁₀Y ₁₀电影。