As silicon transistors face challenges in scaling, nanoelectromechanical systems (NEMS) have emerged as a promising candidate for computing due to the ultralow power consumption and high-temperature compatibility. Yet there is still limited research about highly reconfigurable NEMS-based computing devices that integrate multiple functionalities into a single device. In this work, we present the design, simulation, and verification of a cantilever-based NEMS resonator for highly reconfigurable logic functions. Using a single resonator with multiple inputs, the device can be reconfigured to perform AND, OR, XOR, and NOT logic operations, by changing the combination of inputs. We use both DC and AC voltages as inputs, where AC inputs can be used for better reconfigurability, and DC inputs offer higher On/Off ratio. The cantilever structure has low rigidity and large dynamic range, and thus only requires 5 mV of AC drive to achieve relatively large vibration amplitude. This work presents a unique platform where a single NEMS resonator can be used for reconfigurable computing.

随着硅晶体管在缩放方面面临挑战，由于超低功耗和高温兼容性，纳米机电系统 (NEMS) 已成为计算的有希望的候选者。然而，关于将多种功能集成到单个设备中的基于高度可重构 NEMS 的计算设备的研究仍然有限。在这项工作中，我们展示了基于悬臂梁的 NEMS 谐振器的设计、仿真和验证，用于高度可重构的逻辑功能。使用具有多个输入的单个谐振器，可以通过更改输入组合来重新配置器件以执行 AND、OR、XOR 和 NOT 逻辑运算。我们使用直流和交流电压作为输入，其中交流输入可用于更好的可重构性，直流输入提供更高的开/关比。悬臂结构刚性低，动态范围大，因此仅需5mV的交流驱动即可实现较大的振动幅度。这项工作提供了一个独特的平台，其中单个 NEMS 谐振器可用于可重构计算。