Nanohandling of a robotic system inside an scanning electron microscope (SEM) to manipulate and characterize nanomaterials is a complex task for any user with manual control strategies. Therefore, the need for automation of these robotic systems is increasing rapidly for various interdisciplinary applications in nanotechnology. Here an automatic handling procedure of a piezo-driven nanomanipulation system is described using the SEM vision system as a feedback device for position-based visual servoing closed-loop control. A web-based integrated control interface is designed for the manipulator’s control, which allows a user to command the manipulator for positioning at any desired location within the working space’s view field. It helps in the quick automatic nanopositioning task of the robot end-effector for any required application. The control technique is further applied to demonstrate a manipulation task with spherical shape polystyrene nanoparticles. Additionally, we propose a 3D offline simulation visualization of the manipulation system in the SEM view, which gives virtual configurational feedback of the manipulators and also helps in manipulation task planning.

在扫描电子显微镜 (SEM) 内对机器人系统进行纳米处理以操纵和表征纳米材料对于任何具有手动控制策略的用户来说都是一项复杂的任务。因此，对于纳米技术中的各种跨学科应用，对这些机器人系统自动化的需求正在迅速增加。这里描述了使用 SEM 视觉系统作为基于位置的视觉伺服闭环控制的反馈设备的压电驱动纳米操纵系统的自动处理过程。基于网络的集成控制界面专为操纵器的控制而设计，允许用户命令操纵器定位在工作空间视野内的任何所需位置。它有助于机器人末端执行器的快速自动纳米定位任务，适用于任何所需的应用。该控制技术进一步应用于演示球形聚苯乙烯纳米粒子的操作任务。此外，我们在 SEM 视图中提出了操纵系统的 3D 离线模拟可视化，它提供了操纵器的虚拟配置反馈，也有助于操纵任务规划。