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Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application
Journal of Micromechanics and Microengineering ( IF 2.3 ) Pub Date : 2021-10-19 , DOI: 10.1088/1361-6439/ac2bb1
Prajwal P Patil 1 , Sushma P Kamath 2 , Anup M Upadhyaya 1 , Preeta Sharan 2
Affiliation  

The proposed work consists of a ring resonator-based pressure sensor. Double and triple ring photonic crystal resonators are configured in series and in parallel combinations. The sensing layer is designed and simulated for a varying pressure of 3–9 MPa using ansys workbench to obtain the stress and deformation experienced by the sensor. The equivalent refractive index value for every stress is computed and shift in wavelength is determined by simulation of the photonic crystal ring resonator (PCRR) structures in the optical tool. Finite-difference time-domain results show that ‘three rings coupled in parallel’ PCRR structure have the best sensitivity and good quality factor than other sensing configurations. A maximum sensitivity of 49.77 nm MPa−1 and a quality factor of 3260.25 is observed for the triple-ring parallel PCRR. The proposed type of sensor has remarkable biosensing applications.



中文翻译:

用于压力传感应用的基于光子 MEMS 的微环形谐振器的设计与分析

拟议的工作包括基于环形谐振器的压力传感器。双环和三环光子晶体谐振器串联和并联组合配置。使用 ansys 工作台针对 3-9 MPa 的变化压力设计和模拟传感层,以获得传感器承受的应力和变形。计算每个应力的等效折射率值,并通过模拟光学工具中的光子晶体环谐振器 (PCRR) 结构来确定波长的偏移。时域有限差分结果表明,“三环并联”PCRR 结构比其他传感配置具有最佳的灵敏度和良好的品质因数。最大灵敏度为 49.77 nm MPa -1三环平行 PCRR 的品质因数为 3260.25。所提出的传感器类型具有显着的生物传感应用。

更新日期:2021-10-19
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