In the present study, Ag and Cu metal-assisted chemical etching (MACE) technique was used for etching single-crystalline silicon at 15–25 °C, followed by post-processing with the HF/HNO₃/H₂O solution. Further, the relationship between the shape of the cross-section of the pore and the quality of passivation was deciphered. The parameters Jo1, minority carrier lifetime, and surface recombination velocity were measured, and the correlation between these three parameters and the open-circuit voltage (Voc) value was determined for all solar cells. The changes in the reflectance, solar flux density, and external quantum efficiency with changing wavelength were analyzed, and the relationship of these changes with short-circuit current density was determined. The Voc of all Ag-MACE solar cells is greater than that of all Cu-MACE solar cells, although the efficiency of almost all Cu-MACE solar cells is higher than that of the Ag-MACE solar cells. Furthermore, the electroluminescence image, the adhesion between the silver electrode and the pore, the quality of the aluminum back surface field, the metal residues on the surface, and the bulk of the wafer were systematically investigated. The best solar cell efficiency obtained for Ag-MACE and Cu-MACE PERC structures was 18.68% and 19.32%, respectively.

在本研究中，Ag 和 Cu 金属辅助化学蚀刻 (MACE) 技术用于在 15–25 °C 下蚀刻单晶硅，然后使用 HF/HNO ₃ /H ₂进行后处理哦解决方案。此外，还破译了孔截面形状与钝化质量之间的关系。测量了参数 Jo1、少数载流子寿命和表面复合速度，并确定了这三个参数与所有太阳能电池的开路电压 (Voc) 值之间的相关性。分析了反射率、太阳通量密度和外量子效率随波长变化的变化，并确定了这些变化与短路电流密度的关系。所有Ag-MACE太阳能电池的Voc都大于所有Cu-MACE太阳能电池，尽管几乎所有Cu-MACE太阳能电池的效率都高于Ag-MACE太阳能电池。此外，电致发光图像，系统地研究了银电极与孔隙之间的附着力、铝背面场的质量、表面的金属残留物和晶片的体积。Ag-MACE 和 Cu-MACE PERC 结构获得的最佳太阳能电池效率分别为 18.68% 和 19.32%。