Optical levitation of dielectric particles in vacuum is a powerful technique for precision measurements, testing fundamental physics, and quantum information science. Conventional optical tweezers require bulky optical components for trapping and detection. Here, we design and fabricate an ultrathin dielectric metalens with a high numerical aperture of 0.88 at 1064 nm in vacuum. It consists of 500-nm-thick silicon nano-antennas, which are compatible with an ultrahigh vacuum. We demonstrate optical levitation of nanoparticles in vacuum with a single metalens. The trapping frequency can be tuned by changing the laser power and polarization. We also transfer a levitated nanoparticle between two separated optical tweezers. Optical levitation with an ultrathin metalens in vacuum provides opportunities for a wide range of applications including on-chip sensing. Such metalenses will also be useful for trapping ultracold atoms and molecules.

中文翻译：

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在真空中使用元透镜进行片上光学悬浮

真空中介电粒子的光学悬浮是一种用于精密测量、测试基础物理和量子信息科学的强大技术。传统的光镊需要庞大的光学元件来捕获和检测。在这里，我们设计并制造了一种在真空中在 1064 nm 处具有 0.88 高数值孔径的超薄介电元透镜。它由 500 纳米厚的硅纳米天线组成，与超高真空兼容。我们展示了纳米粒子在真空中使用单个元透镜的光学悬浮。可以通过改变激光功率和偏振来调整俘获频率。我们还在两个分开的光镊之间转移悬浮的纳米颗粒。超薄超薄元透镜在真空中的光学悬浮为包括片上传感在内的广泛应用提供了机会。这种超透镜也可用于捕获超冷原子和分子。