The mass concentration of fine dust or particles acts as a standard measure to express the severity of air pollution. In connection with this, many related sensor technologies have been suggested for both indoor and outdoor uses. Among several technologies, the direct measurement of the dust mass using resonant platforms is the most preferable as it possesses multiple advantages including high sensitivity, low limit of detection, and a rapid response time. Such sensor performances directly rely on the adhesion quality between the sensor substrate and dust. In this work, we introduce a thermally controlled dust capturing scheme by integrating a polystyrene (PS) layer and microheater on quartz crystal microbalance (QCM). The Pt microheater can rapidly heat the sensor up to 100 °C, allowing a controlled switching between the soft and hard conditions of the PS film at a rapid rate. When the film is soft, the sensor can capture dust particle efficiently and we can calibrate the attached particle mass can be calibrated by measuring the resonance response. Compared to a bare QCM, our sensor used in this study exhibits 11 times larger detectable mass range. In addition, heated QCMs show a performance that is comparable to a high-cost particle sensing equipment such as an aerodynamic particle sizer and optical particle counter

细粉尘或颗粒物的质量浓度作为衡量空气污染严重程度的标准。与此相关，许多相关的传感器技术已被建议用于室内和室外使用。在几种技术中，使用共振平台直接测量尘埃质量是最优选的，因为它具有多种优点，包括高灵敏度、低检测限和快速响应时间。这种传感器性能直接取决于传感器基板和灰尘之间的粘附质量。在这项工作中，我们通过在石英晶体微量天平 (QCM) 上集成聚苯乙烯 (PS) 层和微加热器来引入热控粉尘捕获方案。Pt 微型加热器可以将传感器快速加热到 100 °C，允许在 PS 薄膜的软硬条件之间快速进行受控切换。当薄膜柔软时，传感器可以有效地捕获灰尘颗粒，我们可以通过测量共振响应来校准附着的颗粒质量。与裸 QCM 相比，我们在本研究中使用的传感器具有 11 倍的可检测质量范围。此外，加热 QCM 的性能可与高成本的粒子传感设备相媲美，例如气动粒度仪和光学粒子计数器