The directed self-assembly of block copolymers (BCPs) is a powerful motif for the continued scaling of feature sizes for nanoscale devices. A multimechanism directed self-assembly (MMDSA) method is described that generates orthogonal meshes from a polystyrene-b-poly-2-vinylpyridine BCP that is subsequently metallized with Pt. The MMDSA process takes advantage of three different mechanisms, trench wall guidance, edge nucleation, and underlayer guidance, to align the mesh with respect to substrate features. The mechanisms and their interactions are investigated via both experiments and dissipative particle dynamics simulations. MMDSA is applied to produce well-aligned conductive nanomeshes and then is extended to fabricate multicomponent metallic structures with 2D/3D hybrid morphologies.

中文翻译：

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多机制定向自组装制备的金属纳米网

嵌段共聚物 (BCP) 的定向自组装是纳米器件特征尺寸持续缩放的强大主题。描述了一种多机制定向自组装 (MMDSA) 方法，该方法从聚苯乙烯-b-聚-2-乙烯基吡啶 BCP生成正交网格，随后用 Pt 金属化。MMDSA 工艺利用三种不同的机制，沟槽壁引导、边缘成核和底层引导，将网格与基板特征对齐。该机制及其相互作用进行了研究通过实验和耗散粒子动力学模拟。MMDSA 用于生产排列良好的导电纳米网格，然后扩展到制造具有 2D/3D 混合形态的多组分金属结构。