Acceleration sensors have a wide variety of applications for industrial engineering, biology and navigation. However, passive sensing, narrow detection range, large size, and high manufacturing cost curb their further development. Here, we present a miniaturized acceleration sensor (MAS) with rationally patterned electrodes, based on the single electrode triboelectric mechanism, featuring small size, high accuracy, large detection scale, and environmental friendliness. A stainless-steel ball, as the moving part of the MAS, experiences physical movement that is converted into an electrical signal. Equipped with rationally patterned electrodes, the MAS retains the smallest size and lowest weight compared with the currently reported self-powered acceleration sensors. Benefiting from the voltage-relationship-based direction detection mechanism, eight directions can be identified by one TENG module. Consequently, rotated 22.5° relatively, two TENG modules enable the MAS to detect 16 directions. Moreover, accelerations ranging from 0.1 m/s ² to 50 m/s ² can be identified according to the relationship of response time and accelerations in the horizontal direction. The relationship is obtained through the measurements of the sum of output voltages ( V_SOC ) for the four bottom electrodes with varying accelerations. In addition, no distinct decrease of V_SOC is observed after continuously operating for 2000 circles, presenting excellent robustness. Hence, this cost-effective and rationally patterned MAS reveals great potential for human machine interaction, VR/AR (virtual/augmented reality), sports training, and smart city.

中文翻译：

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基于合理图形电极的自供电微型加速度传感器

加速度传感器在工业工程、生物学和导航方面有着广泛的应用。然而，被动传感、检测范围窄、尺寸大和制造成本高限制了它们的进一步发展。在这里，我们提出了一种基于单电极摩擦电机制的具有合理图案化电极的小型化加速度传感器（MAS），具有体积小、精度高、检测规模大和环境友好的特点。不锈钢球作为 MAS 的运动部件，经历物理运动并转换为电信号。配备合理图案的电极，与目前报道的自供电加速度传感器相比，MAS 保持了最小的尺寸和最低的重量。受益于基于电压关系的方向检测机制，一个TENG模块可以识别八个方向。因此，相对旋转 22.5°，两个 TENG 模块使 MAS 能够检测 16 个方向。此外，加速度范围从 0.1 m/s 根据响应时间与水平方向加速度的关系，可识别²～50m/s ²。该关系是通过测量输出电压的总和获得的（ V _SOC ) 用于具有不同加速度的四个底部电极。此外，没有明显减少连续运行2000圈后观察到V _SOC，表现出优异的鲁棒性。因此，这种具有成本效益且结构合理的 MAS 揭示了人机交互、VR/AR（虚拟/增强现实）、运动训练和智慧城市的巨大潜力。