Atomic-scale smooth thin films are keys to successful integration and proper function of many multilayer-structured devices. However, the intrinsic islandlike growth mode prevents human beings from realizing such ultrasmooth films of many important functional materials. To solve this problem, we propose a negative entropy-infusing method that employs evanescent waves to enhance the downward interlayer diffusion of adatoms and thus transform the islandlike growth mode to the layer-by-layer growth mode. The formulas of the optical force and the lowered diffusion barrier were derived, and the application of this theory on a simplified example demonstrates significantly improved surface morphologies through numerical simulations.

中文翻译：

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倏逝波对薄膜生长的调制作用

原子级光滑薄膜是许多多层结构器件成功集成和正常运行的关键。然而，固有的岛状生长模式阻碍了人类实现许多重要功能材料的超光滑薄膜。为了解决这个问题，我们提出了一种负熵注入方法，该方法利用渐逝波来增强吸附原子的向下层间扩散，从而将岛状生长模式转变为逐层生长模式。推导出了光学力和降低的扩散势垒的公式，并将该理论应用于一个简化的例子，通过数值模拟证明了表面形貌的显着改善。