MEMS mirror arrays perform superior than MEMS mirror to assemble a Lidar, but few published papers about the optical intensity and distributions when laser diffracted by MEMS arrays are available, this letter focuses on the issues. Firstly, the complex amplitudes of laser which is diffracted by 1D (dimension) and 2D arrays are presented, respectively. Then we give the optical intensity and distributions on the observation plane. Finally, the simulation diagrams of these distributions are shown, and the correctness of the results is verified by Lumerical FDTD Solutions simulations and Young’s double-slit experiment.

中文翻译：

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夫琅禾费衍射法研究MEMS微镜阵列的光强远场分布

MEMS 反射镜阵列在组装激光雷达方面的性能优于 MEMS 反射镜，但关于 MEMS 阵列激光衍射时的光强度和分布的发表论文很少，本文重点讨论这些问题。首先，分别给出了由一维（维度）和二维阵列衍射的激光的复振幅。然后我们给出观察平面上的光强和分布。最后给出了这些分布的模拟图，并通过Lumerical FDTD Solutions模拟和杨氏双缝实验验证了结果的正确性。